A XeCl laser with high-quality output radiation was created using the effects of phase conjugation and pulse compression at induced Mandelshtam-Brillouin scattering in compressed gases. Parameters of the output radiation are the following:

– wavelength ~ 308 nm;
– coherence length ~ 30 cm;
– pulse duration tuning from 3 ns to 45 ns;
– pulse energy up to 0.1 Joule;
– divergence close to a diffraction one.

The laser is used for investigation of nonlinear optical effects in the UV range. Primary attention is focused on studying the influence of several coherent beams on substance. The action of several beams may produce large ensembles of submicron periodic structures with a period less than 200 nm and the size of each region less than 100 nm. Optimal conditions for obtaining such structures on quartz, semiconductors, polymers, metal films, and other materials were found. The technique is promising for application in nanosize optoelectonics, optical-fiber and planar devices, and semiconductor technology.

Fig. 2. Image of a relief on fused quartz obtained by an atomic-force microscope after etching by Ar ions through a mask in a photoresist.

Fig. 3. Submicron ferromagnetic regions produced by irradiation of a Fe-C film by four beams. The regions have been stretched to increase coercive force of the obtained nanosize elements.