Plasma physics and high-power electronics division |
Department of plasma technology physics Publications 2019 2018 P. A. Yunin, P. V. Volkov, Yu. N. Drozdov, A. V. Koliadin, S. A. Korolev, D. B. Radischev, E. A. Surovegina, V. I. Shashkin, Study of the Structural and Morphological Properties of HPHT Diamond Substrates, Semiconductors (2018) 52: 1432. https://doi.org/10.1134/S1063782618110271 P. A. Yunin, P. V. Volkov, Yu. N. Drozdov, A. V. Koliadin, S. A. Korolev, D. B. Radishchev, E. A. Surovegina, V. I. Shashkin, Study of the Structural and Morphological Properties of HPHT Diamond Substrates, ISSN 1063-7826, Semiconductors, 2018, Vol. 52, No. 11, pp. 1433–1437) M.A. Lobaev, A.M. Gorbachev, S.A. Bogdanov, A.L. Vikharev, D.B. Radishev, V.A. Isaev, M.N. Drozdov, NV?Center Formation in Single Crystal Diamond at Different CVD Growth Conditions, Physica Status Solidi (a), 2018, 1800205, https://doi.org/10.1002/pssa.201800205 O.A. Ivanov, S.A. Bogdanov, A.L. Vikharev, V.V. Luchinin, V.A. Golubkov, A.S. Ivanov, V.A. Ilyin, Emission properties of undoped and boron-doped nanocrystalline diamond films coated silicon carbide field emitter arrays, Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 36, 021204 (2018), https://doi.org/10.1116/1.5012977 M.A. Lobaev, A.M. Gorbachev, A.L. Vikharev, V.A. Isaev, D.B. Radishev, S.A. Bogdanov, M.N. Drozdov, P.A. Yunin, and J.E. Butler, Investigation of boron incorporation in delta doped diamond layers by secondary ion mass spectrometry, Thin Solid Films, Volume 653, May 2018, Pages 215-222, https://doi.org/10.1016/j.tsf.2017.12.008 A.L. Vikharev, A.M. Gorbachev, M.A. Lobaev, D.B. Radishev, Multimode cavity type MPACVD reactor for large area diamond film deposition, Diamond and Related Materials, Volume 83, March 2018, Pages 8-14, https://doi.org/10.1016/j.diamond.2018.01.011 2017 В.А. Кукушкин, Н.В. Байдусь, С.М. Некоркин, Д.И. Курицын, А.В. Здоровейщев, Зависимость кинетики релаксации фотолюминесценции на межзонных переходах в квантовых ямах InGaAs в GaAs от их близости к границе с Au, Оптика и спектроскопия, т. 123, № 5, сс. 757-762 (2017), https://doi.org/10.7868/S0030403417110150 O.A. Ivanov, S.V. Kuzikov, A.A. Vikharev, A.L. Vikharev, M.A. Lobaev, The diamond window with boron-doped layers for the output of microwave radiation at high peak and average power levels, Radiophysics and Quantum Electronics, Vol. 60, No. 5, October, pp. 401-408, 2017, https://doi.org/10.1007/s11141-017-9809-8 M.A. Lobaev, A.M. Gorbachev, S.A. Bogdanov, A.L. Vikharev, D.B. Radishev, V.A. Isaev, V.V. Chernov, M.N. Drozdov, P.A. Yunin, Influence of CVD diamond growth conditions and misorientation angle on nitrogen incorporation, EPJ Web of Conferences 149, 02003 (2017), 2 pages, http://doi.org/10.1051/epjconf/201714902003 M.A. Lobaev, A.M. Gorbachev, A.L. Vikharev, D.B. Radishev, V.A. Isaev, S.A. Bogdanov, P.A. Yunin, M.N. Drozdov, J.E. Butler, Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle, EPJ Web of Conferences 149, 02014 (2017), 2 pages, http://doi.org/10.1051/epjconf/201714902014 A.L. Vikharev, A.M. Gorbachev, M.A. Lobaev, D.B. Radishev, V.A. Isaev, S.A. Bogdanov, M.N. Drozdov, E.V. Demidov, E.A. Surovegina, V.I. Shashkin, P.A. Yunin, J.E. Butler, CVD diamond with boron-doped delta-layers deposited by microwave plasma, EPJ Web of Conferences 149, 01010 (2017), 2 pages, https://doi.org/10.1051/epjconf/201714901010 V.A. Kukushkin, M.A. Lobaev, D.B. Radischev, S.A. Bogdanov, M.N. Drozdov, V.A. Isaev, A.L. Vikharev, A.M. Gorbachev, Diamond Bragg superlattice grown in microwave gas discharge for obtaining photoluminescence of single diamond color centers comprising a dense 3D ensemble, EPJ Web of Conferences 149, 02004 (2017), 2 pages, https://doi.org/10.1051/epjconf/201714902004 D.B. Radishev, A.L. Vikharev, A.M. Gorbachev, A.B. Muchnikov, P.A. Yunin, V.N. Amosov and N.B. Rodionov, Study of grown single crystal diamond by optical and X-ray spectroscopy, EPJ Web of Conferences 149, 02029 (2017), 2 pages, https://doi.org/10.1051/epjconf/201714902029 J.E. Butler, A.L. Vikharev, A.M. Gorbachev, M.A. Lobaev, A.B. Muchnikov, D.B. Radischev, V.A. Isaev, V.V. Chernov, S.A. Bogdanov, M.N. Drozdov, E.V. Demidov, E.A. Surovegina, V.I. Shashkin, A. Davidov, H.Tan, L. Meshi, A.C. Pakpour-Tabrizi, M.L. Hicks, R.B. Jackman, Nanometric diamond delta doping with boron, Phys. Status Solidi RRL 11, No. 1, 1600329 (2017), 6 pages, https://doi.org/10.1002/pssr.201600329 V.A. Kukushkin, Bragg superlattice for obtaining individual photoluminescence of diamond color centers in dense 3D ensembles, Applied Physics A, v. 123, 663 (1-7) (2017), https://doi.org/10.1007/s00339-017-1274-x M.A. Lobaev, A.M. Gorbachev, S.A. Bogdanov, A.L. Vikharev, D.B. Radishev, V.A. Isaev, V.V. Chernov, M.N. Drozdov, Influence of CVD diamond growth conditions on nitrogen incorporation, Diamond and Related Materials, V. 72, February 2017, p. 1–6, http://dx.doi.org/10.1016/j.diamond.2016.12.011 S.A. Bogdanov, A.L. Vikharev, M.N. Drozdov, D.B. Radishev, Synthesis of thick and high-quality homoepitaxial diamond with high boron doping level: Oxygen effect, Diamond and Related Materials, V. 74, April 2017, p. 59–64, http://dx.doi.org/10.1016/j.diamond.2017.02.004 2016 M.A. Lobaev, S.A. Bogdanov, D.B. Radishev, A.L. Vikharev, A.M. Gorbachev. Method of power density determination in microwave discharge, sustained in hydrogen–methane gas mixture // Diamond & Related Materials 66 (2016) 177–182, http://dx.doi.org/10.1016/j.diamond.2016.05.004 V.V. Chernov, A.M. Gorbachev, A.L. Vikharev, and M.A. Lobaev, Criterion for comparison of MPACVD reactors working at different microwave frequencies and diamond growth conditions, Phys. Status Solidi A, vol. 213, Issue 10, (2016), pp. 2564–2569, http://dx.doi.org/10.1002/pssa.201600193 V.V. Chernov, A.M. Gorbachev, A.L. Vikharev, D.B. Radishev, A.V. Kozlov, A continuous microwave discharge maintained by two crossing millimeter-wave beams in hydrogen and argon: Numerical simulation and experiment // Plasma Sources Science and Technology, Volume 25, Number 6, (2016), 065022, http://dx.doi.org/10.1088/0963-0252/25/6/065022 A.V.Golubkov, A.S.Ivanov, V.A.Ilyin, V.V.Luchinin, S.A.Bogdanov, V.V.Chernov and A.L.Vikharev, Stabilizing effect of diamond thin film on nanostructured silicon carbide field emission array, Journal of Vacuum Science & Technology B 34, 062202 (2016), http://dx.doi.org/10.1116/1.4965727 O.A.Ivanov, A.L.Vikharev and A.M.Gorbachev, Experimental study of plasma decay in pulsed microwave discharges of H2, CH4 and their mixtures. Plasma Sources Sci. Technol., 25 (2016) 035017, http://dx.doi.org/10.1088/0963-0252/25/3/035017 A.B.Muchnikov, D.B.Radishev, A.L.Vikharev, A.M.Gorbachev, A.V.Mitenkin, M.lN.Drozdov, Y.N.Drozdov, P.A.Yunin, Characterization of interfaces in mosaic CVD diamond crystal, Journal of Crystal Growth, 442 (2016) 62–67, http://dx.doi.org/10.1016/j.jcrysgro.2016.02.026 V.A. Kukushkin, Simulation of a perfect CVD diamond Schottky diode steep forward current–voltage characteristic, Physica B 498 (2016) 1–6, http://dx.doi.org/10.1016/j.physb.2016.06.011 E. A. Surovegina, E. V. Demidov, M. N. Drozdov, A. V. Murel, O. I. Khrykin, V. I. Shashkin, M. A. Lobaev, A. M. Gorbachev, A. L. Viharev, S. A. Bogdanov, V. A. Isaev, A. B. Muchnikov, V. V. Chernov, D. B. Radishchev, J. E. Butler, Atomic composition and electrical characteristics of epitaxial CVD diamond layers doped with boron, Semiconductors, December 2016, Volume 50, Issue 12, pp 1569–1573, http://dx.doi.org/10.1134/S1063782616120204 N. V. Baidus, V. A. Kukushkin, B. N. Zvonkov, S. M. Nekorkin, Nanoheterostructures with improved parameters for high-speed and efficient plasmon-polariton light emitting Schottky diodes, Semiconductors, November 2016, Volume 50, Issue 11, pp 1554–1560, http://dx.doi.org/10.1134/S1063782616110026 С.А. Богданов, А.Л. Вихарев, М.Н. Дроздов, Исследование синтеза полупроводникового CVD алмаза при высокой степени легирования, Электроника и микроэлектроника СВЧ, 2016. Т. 1. № 1. С. 79-81. P. A. Yunin, Yu. N. Drozdov, V. V. Chernov, V. A. Isaev, S. A. Bogdanov, A. B. Muchnikov, Formation of singular (001) terraces on the surface of single-crystal HPHT diamond substrates, Semiconductors, December 2016, Volume 50, Issue 12, pp 1622–1625, http://dx.doi.org/10.1134/S1063782616120289 2015 V.A. Kukushkin, S.A. Bogdanov, Simulation of CVD diamond-based high speed near-infrared photodetectors, Diamond & Related Materials 60 (2015) 94–98, http://dx.doi.org/10.1016/j.diamond.2015.10.017 V. I. Zubkov, O. V. Kucherova, S. A. Bogdanov, A. V. Zubkova, J. E. Butler, V. A. Ilyin, A. V. Afanas'ev, A. L. Vikharev, Temperature admittance spectroscopy of boron doped chemical vapor deposition diamond, Journal of Applied Physics 118, 145703 (2015); http://dx.doi.org/10.1063/1.4932664 O. A. Ivanov, A. M. Gorbachev, A. L. Vikharev, M. A. Lobaev, V. A. Isaev, V. V. Chernov, Electron emission amplification of cold cathode by two-layer diamond coating, Phys. Status Solidi A, 212: 1779–1784. http://dx.doi.org/10.1002/pssa.201431799 O.A.Ivanov, A.B.Muchnikov, V.V.Chernov, S.A.Bogdanov, A.L.Vikharev, J.E.Butler, Experimental study of hydrogen plasma etching of (100) single crystal diamond in a MPACVD reactor, Materials Letters, 151 (2015) 115–118, http://dx.doi.org/10.1016/j.matlet.2015.03.073 A. B. Muchnikov, A. L. Vikharev, J. E. Butler, V. V. Chernov, V.A. Isaev, S.A. Bogdanov, A. I. Okhapkin, P. A. Yunin, and Y. N. Drozdov, Homoepitaxial growth of CVD diamond after ICP pretreatment, Phys. Status Solidi A, 212: 2572–2577. http://dx.doi.org/10.1002/pssa.201532171 О.И. Хрыкин, Ю.Н. Дроздов, М.Н. Дроздов, П.А. Юнин, В.И. Шашкин, С.А. Богданов, А.Б. Мучников, А.Л. Вихарев, Д.Б. Радищев, Монокристаллические слои GaN/AlN на CVD-алмазе, Письма в ЖТФ, 2015, том 41, вып. 19, c.8-15 М.А. Лобаев, О.А. Иванов, А.Л Вихарев, А.М. Горбачев, В.А. Исаев, Исследование взаимодействия пучка электронов с сильным высокочастотным полем в волноводном переключателе мощного СВЧ компрессора, Изв. Вузов. Радиофизика, т.58, №.11, c.913-922, (2015) A.L.Vikharev, A.B.Muchnikov, D.B.Radishev, V.A.Isaev, O.A.Ivanov, A.M. Gorbachev, Growth and characterization of combined single-crystalline and polycrystalline CVD diamond wafer, Pittsburgh, PA, MRS Proceedings, V.1734, (2015), http://dx.doi.org/10.1557/opl.2015.41 M.A. Lobaev, S.A. Bogdanov, D.B. Radishev, A.L. Vikharev, A.M. Gorbachev, Investigation of microwave discharge in cavity reactor excited in the TM013 mode, Proceedings of IX International workshop “Microwave discharges: fundamentals and applications”, September 7-11, 2015, Cordoba (Spain), pp.83-88 Вихарев А.Л., Лучинин В.В., CVD алмаз – материал для нового поколения электронных приборов: выращивание, характеристики и некоторые применения, Электроника и микроэлектроника СВЧ, 2015. Т. 1. № 1. С. 29-33. О.А. Иванов, М.А. Лобаев, В.В. Чернов, А.Л Вихарев, А.М. Горбачев, В.А. Исаев, Экспериментальное исследование сильноточных катодов на основе алмазных пленок с использованием мощного компрессора СВЧ импульсов, Известия ВУЗов. Радиофизика, т.57, №10, c.797-807, ISSN:0021-3462, (2014) Kukushkin V.A., Snider G.L., Bogdanov S.A., Chernov V.V., Delta layer doping profile in diamond providing high carrier mobility, physica status solidi RRL, 2014, v.8, Issue 10, pp 876–879, http://dx.doi.org/10.1002/pssr.201409302 Bogdanov S.A., Vikharev A.L., Gorbachev A.M., Muchnikov A.B., Raadishev D.B., Ovechkin N.M., Parshin V.V., Growth-rate enhancement of high-quality, low-loss CVD-produced diamond disks grown for microwave windows application, Chemical vapor deposition, 2014, v.20, N1-3, pp.32-38. doi: 10.1002/cvde.201307058 2013 Духновский М.П., Куликов Е.Н., Ратникова А.К., Федоров Ю.Ю., Богданов Ю.М., Вихарев А.Л., Горбачев А.М., Мучников А.Б., Кудряшов О.Ю., Леонтьев И.А., Алмазные материалы и принципы 3D технологии их обработки для изделий электронной техники, Электронная техника. Серия 1: СВЧ техника, вып. 3(518), с. 40-46, 2013 V.V. Chernov, O.A. Ivanov, V.A. Isaev, D.B. Radishev, A. L.Vikharev, A.V. Kozlov, High-current electron emission of thin diamond films deposited on molybdenum cathodes, Diamond & Related Materials, 37, (2013), 87-91. Ivanov O.A., Lobaev M.A., Vikharev А.L., Gorbachev A.M., Isaev V.A., Hirshfield J.L., Gold S.H. and Kinkead A.K., Active Microwave Pulse Compressor Using an Electron-Beam Triggered Switch, Phys. Rev. Lett, 2013, v.110, 031801 2012 Chernov V.V., Vikharev A.L., Gorbachev A.M., Kozlov A.V., Vul A.Ya., Aleksenskii A.E., The nucleation and growth of nanocrystalline diamond films in millimeter-wave CVD reactor, Fullerenes, Nanotubes and Carbon Nanostructures, 2012, v.20, p.600-605. Vikharev A.L., Gorbachev A.M., Muchnikov A.B., Radishev D.B., Kopelovich E.A., Troitskiy M.M., Investigation of the optimized parameters of microwave plasma-assisted chemical vapor deposition reactor operation in a pulsed mode, J. Phys. D: Appl. Phys., 2012, v.45, 395202 2011 Ratnikova A.K., Dukhnovsky M.P., Fedorov Yu.Yu., Zemlyakov V.E., Muchnikov A.B., Vikharev A.L., Gorbachev A.M., Radishev D.B., Altukhov A.A., Mitenkin A.V., Homoepitaxial single crystal diamond grown on natural diamond seeds (type IIa) with boron-implanted layer demonstrating the highest mobility of 1150 cm2/Vs at 300K for ion-implanted diamond, Diamond and Related Materials, 2011, v.20, p.1243-1245. Ivanov O.A., Isaev V.A., Lobaev M.A., Vikharev A.L., and Hirshfield J.L., High power microwave switch employing electron beam triggering with application to active RF pulse compressors, Physical Review ST AB, 2011, v.14, 061301. Vikharev A.L., Ivanov O.A., Gorbachev A.M., Lobaev M.A., Isaev V.A., Tantawi S.G., Lewandowski J.R., Hirshfield J.L., X-band active SLED-II RF pulse compressor with plasma switches, Physical Review ST AB, 2011, v.14, 121302. Ivanov O.A., Isaev V.A., Radishev D.B., Lobaev M.A., Vikharev A.L., Chernov V.V., Kozlov A.V. and Hirshfield J.L., Cold cathode employing diamond and related films, IEEE Trans. on Plasma Science, 2011, v.39, №11, part 1, pp.2794-2795. A. A. Altukhov, A. L. Vikharev, A. M. Gorbachev, M. P. Dukhnovsky, V. E. Zemlyakov, K. N. Ziablyuk, A. V. Mitenkin, A. B. Muchnikov, D. B. Radishev, A. K. Ratnikova, Yu. Yu. Fedorov, Characterization of single-crystal diamond grown from the vapor phase on substrates of natural diamond, Semiconductors, March 2011, Volume 45, Issue 3, pp 392-396 2010 O.A. Ivanov, M.A. Lobaev, V.A. Isaev, A.L. Vikharev, Experimental Study of a Multipactor Discharge on a Dielectrics Surface in a High-Q Microwave Cavity, Plasma Physics Reports, 36 (2010) N 4, 365-374 Ivanov O.A., Lobaev M.A., Isaev V.A., Vikharev А.L., Suppressing and Initiation of Multipactor Discharge on a Dielectric by an External DC Bias, Phys. Rev. ST AB, 13 (2010) 022004 Ivanov O.A., Isaev V.A., Lobaev M.A., Vikharev A.L., Hirshfield J.L., A resonance switch employing an explosive-emission cathode for high-power RF pulse compressors, Applied Physics Letters, 2010, v.97, 031501 O. A. Ivanov, A. A. Vikharev, A. M. Gorbachev, V. A. Isaev, M. A. Lobaev, A. L. Vikharev, S.V. Kuzikov, J. L. Hirshfield, and M. A. LaPointe, "Active quasioptical Ka-band rf pulse compressor switched by a diffraction grating", Physical Review ST AB, 12 (2009) 093501 A. L. Vikharev , A. A. Vikharev, A. M. Gorbachev, O. A. Ivanov, V. A. Isaev, S. V. Kuzikov and M. A. Lobaev, Millimeter-wave electron-beam-switched resonance phase shifter, Technical Physics, 54 (2009) N 11, 1648 M.A. Lobaev, O.A. Ivanov, V.A. Isaev, A.L. Vikharev, Effect of Inhomogeneous Microwave Field on the Threshold of Multipactor Discharge on a Dielectric, Technical Physics Letters, 35 (2009) N 12, 1074 A.L. Vikharev, A.A. Vikharev, A.M. Gorbachev, O.A. Ivanov, V.A. Isaev, S.V. Kuzikov, A Quasi-Optical Phase Shifter Based on an Active Grating for the 8-mm Wavelength Range, Technical Physics Letters, 35 (2009) N 5, 421 A. L. Vikharev , A. M. Gorbachev, O. A. Ivanov, V. A. Isaev, S. V. Kuzikov, B. Z. Movshevich, J. L. Hirshfield, S. H. Gold, Active Bragg Compressor of 3-cm Wavelength Microwave Pulses, Radiophysics and Quantum Electronics, 51 (2008) N 7, 539 A.L. Vikharev, A.M. Gorbachev, O.A. Ivanov, V.A. Isaev, V.A. Koldanov, S.V. Kuzikov, J.L. Hirshfield, S.H. Gold, Two-Channel 100-MW Microwave Compressor for the Three-Centimeter Wavelength Range, Radiophysics and Quantum Electronics, 51 (2008) N 8, 597-616 A. L. Vikharev, A. M. Gorbachev, D. B. Radishev, A. V. Kozlov, "Gas temperature measurements in a 30GHz gyrotron-based CVD reactor", Proc. of the Intern. Conf. on Phenomena in Ionized Gases, Prague, Czech Republic, 2007, с.1653 A. L. Vikharev, A. M. Gorbachev, A. B. Muchnikov and D. B. Radishchev, Study of microwave plasma-assisted chemical vapor deposition of poly-and single-crystalline diamond films, Radiophysics and Quantum Electronics, 50 (2007) N 10-11, 913 A. L. Vikharev, A. M. Gorbachev, O. A. Ivanov , V. A. Isaev, S. V. Kuzikov, M. A. Lobaev, A plasma switch based on TE02 - TE01 round waveguide mode conversion for high-power X-band microwave compressors, Technical Physics Letters, 33 (2007) N 9, 785 A. L. Vikharev, A.M. Gorbachev, A.V. Kozlov, V.A. Koldanov, A.G. Litvak, N.M. Ovechkin, D.B. Radishev, Yu.V. Bykov, M. Caplan, Diamond films grown by millimeter wave plasma-assisted CVD reactor, Diamond and Related Materials, 15 (2006) 502–507 V. A. Koldanov, A. M. Gorbachev, A. L. Vikharev, and D. B. Radishchev, Self-Consistent Simulation of Pulsed and Continuous Microwave Discharges in Hydrogen, Plasma Physics Reports, 31 (2005) N 11, 965 Vikharev A.L., Ivanov O.A., Gorbachev A.M., Kuzikov S.V., Isaev V.A., Koldanov V.A., Lobaev M.A., Hirshfield J.L., LaPointe M.A., Nezhevenko O.A., Gold S.H. and Kinkead A.K. Active compression of rf pulses (review paper), Proceedings of the NATO Advanced Research Workshop on Quasi–Optical Control of Intense Microwave, Ed. by J. L. Hirshfield and M.I. Petelin, NATO Science Series II “Quasi–Optical Control of Intense Microwave Transmission”, Springer, v.203, pp.199–218, 2005 2003 Vikharev A.L., Gorbachev A.M., Ivanov O.A., Isaev V.A., Kuzikov S.V., Hirshfield J.L., Nezhevenko O.A., Gold S.H., Kinkead A.K, Radiophysics and Quantum Electronics, 46 (2003) N 10, 802 A.L.Vikharev, Yu.Yu.Danilov, A.M.Gorbachev, S.V.Kuzikov, Yu.I.Koshurinov, V.G.Paveliev, M.I.Petelin, J.L.Hirshfield, Quasi-optical microwave pulse compressor at 34GHz, AIP Conference Proceedings, 647 (2002) 448 A.L. Vikharev, A.M. Gorbachev, O.A. Ivanov, et. al. "Two channel active high-power X-band pulse compressor", AIP Conference Proceedings, 569 (2001) 741
Vikharev A.L., Gas discharge produced by strong microwaves of nanosecond duration (review paper), Journal of Technical Physics, 2000, v.41, №1, Special issue, p.485-503 O. A. Ivanov and V. A. Koldanov, Self-Consistent Model of a Pulsed Air Discharge Excited by Surface Waves, Plasma Physics Reports, 26 (2000) N 10, 902 T.A. Grotjohn, J. Asmussen, J. Sivagnaname, D. Story, A.L. Vikharev, A. Girbachev, A. Kolisko, Electron density in moderate pressure diamond deposition discharges, Diamond and Related Materials, 2000, v.9, p. 322-327
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